that uses RF power to generate plasma between the target and the substrate to achieve thin film deposition.
Our company's
planar arc technology, combined with radio frequency
magnetron sputtering technology, is widely used in the preparation of semiconductors, optoelectronic devices and various
surface coatings. It has become one of the important technologies for thin film preparation due to its many advantages such as low deposition temperature, fast deposition speed, good uniformity of deposited thin films, and composition close to the target material composition.